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Conferences > OFC > 2023 > M4I > M4I.3

Wafer scale Ge-on-Si metalens for the mid-infrared

Yanyan Zhou, Qize Zhong, Zhihao Ren, Landobasa Y. M. Tobing, Yuan Hsing Fu, Rachel Ang, Bo Li, Hong Zhou, Chengkuo Lee, and Lennon Y. T. Lee

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Abstract

We report the first demonstration of metalens devices fabricated on an 8-inch Ge-on-Si wafer for the mid-infrared regime. Experimental observations of beam focusing show good match with the design.

© 2023 The Author(s)

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