Abstract

Diamond Growth by Chemical Vapor Deposition has developed in the last years to the point of being commercially used in industrial applications¹⁾. Due to the superiority of many of its properties, applications of diamond films can be found in the tool industry (e.g. wear resistant coatings), semiconductor industry (e.g. heat conductive substrates) and optical industry (sturdy optical coatings). The early nucleation stages, however, are still not fully understood.

© 1998 IEEE