Abstract
Pulsed laser irradiation of a solid can lead to various types of surface modification effect. For example, well known phenomena include melting, evaporation, ablation, and deposition of materials. Here we report on a new effect, namely, the removal of various particulate contaminants from surfaces by pulsed excimer laser irradiation at 248 and 308 nm.1
© 1990 Optical Society of America
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